Resident-entity based simulation of batch chamber tools in 300mm semiconductor manufacturing

Winter Simulation Conference Proceedings

Volumn 2, Issue , 2003, Pages 1398-1405

  Govind, Nirmal ^a   Fronckowiak, David ^b  

^a The Pennsylvania State University   (United States)

^b IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BATCH DATA PROCESSING; COMPUTER SIMULATION; MATHEMATICAL MODELS; PARAMETER ESTIMATION; PRODUCTION CONTROL; QUEUEING THEORY; SCHEDULING; SERVERS; TRANSIENTS; WSI CIRCUITS; TOOLS;

BATCH CHAMBER TOOLS;

SEMICONDUCTOR DEVICE MANUFACTURE;

ENTITY MODELING; ENTITY-TYPES; LOT-SIZE; PILOT SIMULATION; SEMICONDUCTOR MANUFACTURING; SIMULATION MODEL; SIMULATION STUDIES; TIME MODELING; WET BENCH; WET-PROCESSING;

EID: 1642477907     PISSN: 02750708     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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