Overhead intrabay automation and microstocking - a virtual fab case study

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1997, Pages 368-372

  Campbell, Philip L ^a   Laitinen, Glen ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FACTORY AUTOMATION; MATERIALS HANDLING; PROCESS CONTROL; VIRTUAL REALITY;

MICROSTOCKING; OVERHEAD INTRABAY AUTOMATION; ZERO FOOT PRINT AUTOMATION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031343206     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)