Self-organised growth of silicon structures on silicon during oxide desorption

Materials Science and Engineering: B

Volumn 88, Issue 2-3, 2002, Pages 220-224

  Palermo, V ^a   Jones, D ^a  

^a CNR   (Italy)

Author keywords

Nanostructures; Self organisation; Silicon on silicon; STM

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC CURRENTS; INTERFACES (MATERIALS); MICROELECTRONICS; RAPID THERMAL ANNEALING; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR GROWTH; SILICA; SURFACE STRUCTURE; TEMPERATURE PROGRAMMED DESORPTION; THERMAL DIFFUSION IN SOLIDS; ULTRAHIGH VACUUM;

SELF-ORGANIZATION; SILICON-ON-SILICON; STM;

NANOSTRUCTURED MATERIALS;

EID: 1642415193     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(01)00867-4     Document Type: Conference Paper

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