Void formation on ultrathin thermal silicon oxide films on the Si(100) surface

Applied Physics Letters

Volumn 69, Issue 9, 1996, Pages 1270-1272

  Wei, Yi ^a   Wallace, Robert M ^a   Seabaugh, Alan C ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000537833     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117388     Document Type: Article

References (20)

1. M. Ono, M. Saito, T. Yoshitomi, C. Fiegna, T. Ohguro, H. S. Momose, and H. Iwai, J. Vac. Sci. Technol. B 13, 1740 (1995).
2. 2cA. C. Seabaugh, C.-C. Cho, R. M. Steinhoff, T. S. Moise, K. H. Park, and Y. Okuno, Silicon-Based Resonant Tunneling (R & D Association for Future Electron Devices, Tokyo, 1996), Vol. 6.
3. M. Liehr, J. E. Lewis, and G. W. Rubloff, J. Vac. Sci. Technol. A 5, 1559 (1987).
4. G. W. Rubloff, J. Vac. Sci. Technol. A 8, 1857 (1990).
5. R. Tromp, G. W. Rubloff, P. Balk, F. K. LeGoues, and J. Van Loenen, Phys. Rev. Lett. 55, 2332 (1985).
6. Y.-K. Sun, D. J. Bonser, and T. Engel, Phys. Rev. B 43, 14309 (1991).
7. K. E. Johnson and T. Engel, Phys. Rev. Lett. 69, 339 (1992).
8. K. E. Johnson, P. K. Wu, M. Sander, and T. Engel, Surf. Sci. 290, 213 (1993).
9. Y. Kobayashi and K. Suggii, J. Vac. Sci. Technol. B 9, 748 (1991); Y. Kobayashi, Y. Shinoda, and K. Suggii, Jpn. J. Appl. Phys. 29, 1004 (1990).
10. Y. Kobayashi and K. Suggii, J. Vac. Sci. Technol. B 9, 748 (1991); Y. Kobayashi, Y. Shinoda, and K. Suggii, Jpn. J. Appl. Phys. 29, 1004 (1990).
11. J. J. Lander and J. Morrison, J. Appl. Phys. 33, 2098 (1962).
12. Omicron Associates UHV AFM/STM.
13. R. M. Wallace, P. J. Chen, S. A. Henck, and D. A. Webb, J. Vac. Sci. Technol. A 13, 1345 (1995).
14. J. L. Alay, M. Fukuda, C. H. Bjorkman, K. Nakagawa, S. Yokoyama, S. Sasaki, and M. Hirose, Jpn. J. Appl. Phys. 34, L653 (1995).
15. R. M. Wallace and Y. Wei (unpublished).
16. Y. M. Mo, J. Kleiner, M. B. Webb, and M. G. Lagally, Phys. Rev. Lett. 66, 1998 (1991).
17. G. Brocks, P. J. Kelly, and R. Car, Phys. Rev. Lett. 66, 1729 (1991).
18. C. Roland and G. Gilmer, Phys. Rev. B 46, 13428 (1992).
19. C. Roland and G. Gilmer, Phys. Rev. B 46, 13437 (1992).
20. S. Tang, Y. Wei, and R. M. Wallace (unpublished).