Nanoscale roughening of Si(001) by oxide desorption in ultrahigh vacuum

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 1043-1047

  Gray, Struan M ^a   Johansson, Mikael K J ^a   Johansson, Lars S O ^a  

^a LUND UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346189091     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588451     Document Type: Article

References (19)

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