Extreme ultraviolet optical constants for the design and fabrication of multilayer-coated gratings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5538, Issue , 2004, Pages 43-52

  Seely, J ^a   Goray, L ^b   Windt, D ^c   Kjornrattanawanich, B ^d   Uspenskii, Y ^e   Vinogradov, A ^e  

^a NAVAL RESEARCH LABORATORY   (United States)

^b Intl Intellectual Group Inc   (United States)

^c Och Spine at New York Presbyterian Hospitals   (United States)

^d BROOKHAVEN NATIONAL LABORATORY   (United States)

^e LEBEDEV PHYSICAL INSTITUTE   (Russian Federation)

Author keywords

Diffraction gratings; Extreme ultraviolet; Multilayer coatings; X ray optics

Indexed keywords

EXTREME GRATINGS; EXTREME ULTRAVIOLET; MULTILAYER COATINGS; MULTILAYER GRATING; ULTRAVIOLET IMAGING SPECTROMETER (EIS); X-RAY OPTICS;

COATINGS; CONTAMINATION; IMAGING TECHNIQUES; LIGHT ABSORPTION; MULTILAYERS; OPTICS; OXIDATION; SPECTROMETERS; X RAYS;

DIFFRACTION GRATINGS;

EID: 15844394112     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.559053     Document Type: Conference Paper

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