Ultrahigh vacuum deposition-reflectometer system for the in situ investigation of Y/Mo extreme-ultraviolet multilayer mirrors

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 6, 1997, Pages 3069-3081

  Montcalm, Claude ^a,b,c   Sullivan, Brian T ^a   Ranger, Martial ^a   Pépin, Henri ^b  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b INRS EMT   (Canada)

^c LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031478111     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580849     Document Type: Article

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