Electrochemical Impedance Spectroscopy Investigation of Bath Aging in Damascene Process Chemistries

Electrochemical and Solid-State Letters

Volumn 7, Issue 3, 2004, Pages

  Gabrielli, C ^a   Mocoteguy, P ^a   Perrot, H ^a   Zdunek, A ^b   Bouard, P ^c   Haddix, M ^d  

^a Université Pierre et Marie Curie   (France)

^b Chicago Research Center Inc   (United States)

^c Centre de Recherche Claude Delorme   (France)

^d Dallas Research Laboratory   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AGING OF MATERIALS; CAPACITANCE; COPPER; CORRELATION METHODS; ELECTRIC IMPEDANCE; MORPHOLOGY; QUARTZ; SCANNING ELECTRON MICROSCOPY; SOLUTIONS; SPECTROSCOPIC ANALYSIS; SURFACE ROUGHNESS;

ELECTROCHEMICAL IMPEDANCE; IMPEDANCE SPECTROSCOPY;

ELECTROCHEMISTRY;

EID: 1542470432     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1643793     Document Type: Article

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