Piezoresistive CMOS Beams for Inertial Sensing

Proceedings of IEEE Sensors

Volumn 2, Issue 1, 2003, Pages 451-456

  Chaehoi, A ^a   Latorre, L ^a   Nouet, P ^a   Baglio, S ^b  

^a UNIV MONTPELLIER   (France)

^b UNIVERSITY OF CATANIA   (Italy)

Author keywords

Accelerometer; CMOS; MEMS; Sensor

Indexed keywords

ACCELEROMETERS; ANISOTROPY; CAPACITANCE; MICROMACHINING; PIEZOELECTRIC DEVICES; POLYSILICON; RESIDUAL STRESSES; RESISTORS; SENSORS; SIGNAL FILTERING AND PREDICTION; SPECTRUM ANALYSIS; SPURIOUS SIGNAL NOISE;

CAPACITIVE DETECTION; MEMS; WHEATSTONE BRIDGE STRUCTURE;

CMOS INTEGRATED CIRCUITS;

EID: 1542363546     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

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