Characterization of CMOS MEMS Technology Scatterings

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2001, Pages 373-377

  Latorre, L ^a   Beroulle, V ^a   Dardalhon, M ^a   Nouet, P ^a   Pressecq, F ^b   Oudea, C ^c  

^a Lab Info Robotique/MM   (France)

^b CNES   (France)

^c European Aeronautic Defense and Space Company   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER AIDED DESIGN; DIFFERENTIAL EQUATIONS; MAGNETIC FIELDS; MATHEMATICAL MODELS; MICROMACHINING; POLYSILICON; SCATTERING; SIGNAL PROCESSING;

FRONT SIDE BULK MICROMACHINING (FSBM); PARAMETER VARIATIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 1542330620     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. J.M. Karam, B. Courtois, J.M. Paret, "Microelectronics Compatible Manufacturing Techniques of Microsystems", Proc. Mechatronics 96.
2. H. Xie, G.K. Fedder, "A CMOS-MEMS Lateral-axis Gyroscope", Micro Electro Mechanical Systems (MEMS) Conference, Interlaken, Switzerland, January 21-25, 2001, pp. 162, 165.
3. B.Courtois, S. Mir, D. Veychard, J.M. Karam, A.S. Castillejo, "Failure Mechanisms and Fault Classes for CMOS-Compatible Microelectromechanical Systems". ITC 98. TIMA Grenoble.
4. Circuits Multi-projets (CMP) is a broker in ICs, MCMs and MEMS. See http://cmp.imag.fr/
5. See http://www.ams.c.at
6. Ion Beam Services, ZI Peynier Rousset, Rue Gaston Imbert Prolongée, 13790 Peynier - France - Email: ion-beam-services@wanadoo.fr
7. L. Latorre, P. Nouet, Y. Bertrand, P. Hazard, F. Pressecq, "Characterization and modeling of a CMOS-compatible MEMS technology", Sensors and Actuators, Vol. 74, 1999, pp. 143-147.