Micro-Electro-Mechanical Digital-to-Analog Converter Based on a Novel Bimorph Thermal Actuator

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 1036-1041

  Liu, Qingquan ^a   Huang, Qing An ^a  

^a Southeast University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; ELECTRIC POTENTIAL; ERROR ANALYSIS; ETCHING; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; NETWORKS (CIRCUITS); NONLINEAR SYSTEMS; RESISTORS; STIFFNESS;

NONLINEAR ERRORS; THERMAL ACTUATORS;

ANALOG TO DIGITAL CONVERSION;

EID: 1542331484     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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