Simulation and design optimization of novel microelectromechanical digital-to-analog converter

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 22, Issue 12, 2001, Pages 1543-1545

  Liu, Qing Quan ^a   Huang, Qing An ^a  

^a SOUTHEAST UNIVERSITY   (China)

Author keywords

Digital to analog converter; FEA; MEMS; Microactuators; Precise positioning

Indexed keywords

FINITE ELEMENT METHOD; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION;

MICROELECTROMECHANICAL SYSTEM; PRECISE POSITIONING; WEIGHTED GAP PRINCIPLE;

DIGITAL TO ANALOG CONVERSION;

EID: 0035741502     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)