Design and finite element analysis of weighted-stiffness microelectromechanical digital-to-analogue converters

Electronics Letters

Volumn 37, Issue 12, 2001, Pages 755-756

  Liu, Q ^a   Huang, Q A ^a  

^a SOUTHEAST UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIGITAL TO ANALOG CONVERSION; ELECTRIC POTENTIAL; ERROR ANALYSIS; FINITE ELEMENT METHOD; STIFFNESS;

WEIGHTED-STIFFNESS (WS) PRINCIPLE;

MICROELECTROMECHANICAL DEVICES;

EID: 0035821897     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20010528     Document Type: Article

References (5)

1. Mechanical digital-to-analog converters
2. A digital-to-analog converter of displacement by an integrated micromechanism
3. Micro-electro-mechanical digital-to-analog converter (MEMDAC)
4. Microelectromechanical digital-to-analog converters of displacement for step motion actuators
5. A simple approach to characterizing the driving force to polysilicon laterally driven thermal microactuators