Contactless Failure Analysis of Integrated Circuits via Current Contrast Imaging with Magnetic Force Microscopy

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2001, Pages 199-208

  Mertin, W ^a   Weber, R ^a   Seifert, F ^a   Kubalek, E ^a   Zimmermann, G ^b   Boit, C ^b  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

^b INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETIC FORCE MICROSCOPY (MFM); SCANNING FORCE MICROSCOPY;

ELECTRIC CURRENT MEASUREMENT; ELECTRON BEAMS; FAILURE ANALYSIS; IMAGING TECHNIQUES; MAGNETIC FIELD MEASUREMENT; NETWORKS (CIRCUITS);

INTEGRATED CIRCUITS;

EID: 1542318434     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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