New bifunctional topography and current probe for scanning force microscope testing of integrated circuits

Microelectronics Reliability

Volumn 39, Issue 6-7, 1999, Pages 975-980

  Bae, S ^a   Schiemann, K ^a   Mertin, W ^a   Kubalek, E ^a   Maywald, M ^b  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

^b INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENT MEASUREMENT; FAILURE ANALYSIS; MAGNETIC ANISOTROPY; MAGNETIC FIELD EFFECTS; MAGNETIC FIELD MEASUREMENT; MAGNETORESISTANCE; MICROSCOPES; SENSORS;

ANISOTROPIC MAGNETORESISTIVE SENSOR; BIFUNCTIONAL TOPOGRAPHY; SCANNING FORCE MICROSCOPE TESTING;

INTEGRATED CIRCUIT TESTING;

EID: 0033143222     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(99)00133-X     Document Type: Article

References (6)

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