Non-contact probing of high speed microelectronics using electrostatic force sampling

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 830-833

  Bridges, G E ^a   Noruttun, D ^a   Said, R A ^a   Thomson, D J ^a   Lam, T ^a   Qi, R ^a  

^a UNIVERSITY OF MANITOBA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032371449     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581067     Document Type: Article

References (11)

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