Morphology, Structure and Constitution of Metastable Single-Phase Ti1-xAlxN Films Grown by Reactive MSIP

Mikrochimica Acta

Volumn 125, Issue 1, 1997, Pages 143-148

  Von Richthofen, Alexander ^a   Cremer, Rainer ^a   Neuschütz, Dieter ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

(Ti,Al)N; Hard coating; Metastable ceramic phases; Ti1 xAlxN

Indexed keywords

EID: 0001480516     PISSN: 00263672     EISSN: None     Source Type: Journal    
DOI: 10.1007/bf01246177     Document Type: Article

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