Arrayed microcolumn operation with a wafer-scale Einzel lens

Microelectronic Engineering

Volumn 78-79, Issue 1-4, 2005, Pages 55-61

  Kim, Ho Seob ^a   Kim, Dae Wook ^a   Ahn, Seungjoon ^a   Kim, Young Chul ^a   Cho, Jaewon ^b   Choi, Sang Kook ^c   Kim, Dae Yong ^c  

^a SunMoon University   (South Korea)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^c Kwangwoon University   (South Korea)

Author keywords

Deflector; Einzel lens; Microcolumn; Wafer scale column module

Indexed keywords

ARRAYS; ELECTRIC POTENTIAL; ELECTRIC POWER SYSTEMS; ELECTRON EMISSION; FABRICATION; IMAGE PROCESSING; OPTICAL INSTRUMENT LENSES; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

DEFLECTORS; EINZEL LENS; MICROCOLUMNS; WAFER-SCALE COLUMN MODULES;

LITHOGRAPHY;

EID: 14944359218     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2004.12.092     Document Type: Conference Paper

References (8)

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