A miniaturized electron beam column simulation by the fast moving least square reproducing kernel point collocation method

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 6 B, 2003, Pages 3842-3848

  Kim, Do Wan ^a   Kim, Yongsik ^b   Kim, Young Chul ^a   Kim, Ho Seob ^a   Ahn, Seungjoon ^a   Park, Yoon Young ^a   Kim, Dae Wook ^a  

^a SunMoon University   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

Computational methodology; Dilation function; Electron beam; Electrostatic microcolumn; FMLSRK method; Point collocation scheme

Indexed keywords

ASPECT RATIO; COMPUTER SIMULATION; FINITE DIFFERENCE METHOD; FINITE ELEMENT METHOD; LEAST SQUARES APPROXIMATIONS; LENSES;

KERNEL POINTS;

ELECTRON BEAMS;

EID: 0042864444     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.3842     Document Type: Conference Paper

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