Experimental evaluation of a 20×20 mm footprint microcolumn

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3792-3796

  Kratschmer, E ^a   Kim, H S ^a   Thomson, M G R ^a   Lee, K Y ^a   Rishton, S A ^a   Yu, M L ^a   Zolgharnain, S ^a   Hussey, B W ^a   Chang, T H P ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000457160     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588669     Document Type: Review

References (12)

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