Experimental evaluation of a miniature electrostatic thin-foil electron optical column for high current and low-voltage operation

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3181-3184

  Winkler, Dieter ^a   Bubeck, Claus D ^b   Fleischmann, Andreas ^b   Knell, Guido ^b   Lutsch, Yvonne ^b   Plies, Erich ^b  

^a ICT GmbH   (Germany)

^b UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000092862     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590347     Document Type: Article

References (9)

1. M. Brunner, R. Schmid, and T. Schwedes, Inform. Disp. 12, 14 (1996).
2. F. Burstert, D. Winkler, and B. Lischke, Microelectron. Eng. 31, 95 (1996).
3. T. H. P. Chang, D. P. Kern, and M. A. Mc Cord, J. Vac. Sci. Technol. B 7, 1855 (1989).
4. E. Kratschmer, H. S. Kim, M. G. R. Thomson, K. Y. Lee, S. A. Rishton, and M. L. Yu, J. Vac. Sci. Technol. B 13, 2498 (1995).
5. C.-D. Bubeck, Diploma thesis, Tübingen University, Germany, 1997.
6. A. Fleischmann, Diploma thesis, Tübingen University, Germany, 1996.
7. J. Orloff and L. Swanson, J. Appl. Phys. 50, 2494 (1979).
8. C.-D. Bubeck, A. Fleischmann, G. Knell, R. Y. Lutsch, E. Plies, and D. Winkler, Proceedings of the Charged Particle Optics Conference, 14-17 April 1998 [to be published in Nucl. Instrum. Methods Phys. Res. A].
9. C.-D. Bubeck, A. Fleischmann, G. Knell, R. Y. Lutsch, E. Plies, and D. Winkler, Proceedings of the Charged Particle Optics Conference, 14-17 April 1998 [to be published in Nucl. Instrum. Methods Phys. Res. A].