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Volumn , Issue , 2004, Pages 171-176

A low cost bumping method for flip chip assembly and MEMS integration

Author keywords

[No Author keywords available]

Indexed keywords

COSTS; ELECTROFORMING; FLIP CHIP DEVICES; GOLD; INTEGRATED CIRCUIT LAYOUT; MICROELECTROMECHANICAL DEVICES; NICKEL; PHOTOLITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; SENSORS;

EID: 14844320107     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (5)

References (10)
  • 4
    • 0033138345 scopus 로고    scopus 로고
    • High aspect ratio UV photolithography for electroplated structures
    • Roth, S. et al, "High aspect ratio UV photolithography for electroplated structures,", J. Micromech. Microeng., Vol. 9, No. 2 (1999), pp. 105-108.
    • (1999) J. Micromech. Microeng. , vol.9 , Issue.2 , pp. 105-108
    • Roth, S.1
  • 5
    • 0027607944 scopus 로고
    • Metallic microstructures fabricated using photosensitive polyimide electroplating methods
    • Frazier, A. B., et al, "Metallic microstructures fabricated using photosensitive polyimide electroplating methods," J. Microelectromech. Sys., Vol. 2 (1993), pp. 87-94.
    • (1993) J. Microelectromech. Sys. , vol.2 , pp. 87-94
    • Frazier, A.B.1
  • 6
    • 0004638485 scopus 로고    scopus 로고
    • Wire interconnect technology - An ultra-high-density flip chip-substrate connection method
    • J. H. Lau, Ed., McGraw-Hill
    • Moresco, L. et al, "Wire interconnect technology - An ultra-high-density flip chip-substrate connection method" Flip Chip Technologies, J. H. Lau, Ed., McGraw-Hill (1996), pp. 367-385.
    • (1996) Flip Chip Technologies , pp. 367-385
    • Moresco, L.1
  • 7
    • 0033138327 scopus 로고    scopus 로고
    • Potentialities of a new positive photoresist for the realization of thick moulds
    • Conédéra, V., "Potentialities of a new positive photoresist for the realization of thick moulds," J. Micromech. Microeng., Vol. 9, No. 2, (1999), pp. 173-175.
    • (1999) J. Micromech. Microeng. , vol.9 , Issue.2 , pp. 173-175
    • Conédéra, V.1
  • 8
    • 0033355776 scopus 로고    scopus 로고
    • Electroless remetallization of aluminium bond pads on CMOS driver chip for flip-chip attachment to vertical cavity surface emitting lasers (VCSEL's)
    • Datta, M. et al, "Electroless remetallization of aluminium bond pads on CMOS driver chip for flip-chip attachment to vertical cavity surface emitting lasers (VCSEL's)," IEEE Transactions on Components and Packaging Technology, Vol. 22, No. 2 (1999), pp. 299-306.
    • (1999) IEEE Transactions on Components and Packaging Technology , vol.22 , Issue.2 , pp. 299-306
    • Datta, M.1
  • 9
    • 0037051216 scopus 로고    scopus 로고
    • Zincating morphology of aluminium bond pad: Its influence on quality of electroless nickel bumping
    • Qi, G. et al, "Zincating morphology of aluminium bond pad: its influence on quality of electroless nickel bumping," Thin Solid Films, Vol. 406, (2002), pp. 219-223.
    • (2002) Thin Solid Films , vol.406 , pp. 219-223
    • Qi, G.1
  • 10
    • 0037051253 scopus 로고    scopus 로고
    • Influence of bath chemistry on zincate morphology on aluminium bond pad
    • Qi, G. et al, "Influence of bath chemistry on zincate morphology on aluminium bond pad," Thin Solid Films, Vol. 406, (2002), pp. 204-209.
    • (2002) Thin Solid Films , vol.406 , pp. 204-209
    • Qi, G.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.