Off-axis electron holography of unbiased and reverse-biased focused ion beam milled Si p-n junctions

Microscopy and Microanalysis

Volumn 11, Issue 1, 2005, Pages 66-78

  Twitchett, Alison C ^a   Dunin Borkowski, Rafal E ^a   Hallifax, Robert J ^a   Broom, Ronald F ^a   Midgley, Paul A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Charge density; Electric field; Electrostatic potential; Focused ion beam milling; Off axis electron holography; p n junction; Reverse bias; Specimen preparation

Indexed keywords

EID: 14744270506     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S1431927605050087     Document Type: Article

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