Magnetic field enhanced plasma (MFEP) deposition of inner surfaces of tubes

Surface and Coatings Technology

Volumn 188-189, Issue 1-3 SPEC.ISS., 2004, Pages 691-696

  Wei, Ronghua ^a   Rincon, Christopher ^a   Booker, Thomas L ^a   Arps, James H ^a  

^a SOUTHWEST RESEARCH INSTITUTE   (United States)

Author keywords

Inner surface; MFEP deposition; Tube

Indexed keywords

CARBON; CATHODES; COATING TECHNIQUES; MAGNETIC FIELDS; PLASMA APPLICATIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; THIN FILMS; TUBES (COMPONENTS);

HARD COATINGS; MAGNETIC FIELD ENHANCED PLASMA (MFEP) DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD); PLASMA PROPERTIES;

DEPOSITION;

COATING; MAGNETIC FIELD; PIPE; PLASMA TREATMENT;

EID: 14644409784     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.07.077     Document Type: Article

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