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Volumn 94-95, Issue , 1997, Pages 291-296
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CVD coatings from the A1-B-Si system on carbon
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Author keywords
A1 B Si; Borides; Coatings; CVD process
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Indexed keywords
ALUMINUM COMPOUNDS;
CARBON;
CHEMICAL VAPOR DEPOSITION;
GRAIN GROWTH;
GRAIN SIZE AND SHAPE;
SILICON COMPOUNDS;
SUBSTRATES;
TERNARY SYSTEMS;
ALUMINUM BORIDE;
SILICON BORIDE;
BORIDE COATINGS;
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EID: 0031246492
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(97)00352-6 Document Type: Article |
Times cited : (3)
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References (19)
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