Ion implantation into the interior surface of a steel tube by plasma source ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 69-73

  Baba, K ^a   Hatada, R ^a  

^a Technology Center of Nagasaki   (Japan)

Author keywords

Inner implantation; Plasma source ion implantation; Surface modification; Tube

Indexed keywords

ACETYLENE; ELECTRIC POTENTIAL; ELECTRON CYCLOTRON RESONANCE; MAGNETIC FIELDS; MORPHOLOGY; NITROGEN; PLASMA APPLICATIONS; PLASMA SOURCES; SOLENOIDS; STAINLESS STEEL; STEEL PIPE; SURFACE TREATMENT;

PLASMA SOURCE ION IMPLANTATION (PSII);

ION IMPLANTATION;

EID: 0033513850     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00744-7     Document Type: Article

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