An apparatus for sputter coating the inner walls of tubes

Review of Scientific Instruments

Volumn 67, Issue 1, 1996, Pages 318-321

  Ensinger, W ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

PHYSICAL VAPOR DEPOSITION; PLATINUM; SILVER; STEELS; SURFACE COATING; TANTALUM; TUBES

Indexed keywords

EID: 85009896231     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1146588     Document Type: Article

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