Deposition of diamond-like carbon films on inner wall of sub-millimeter diameter steel tube by plasma source ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 704-707

  Baba, K ^a   Hatada, R ^a  

^a INDUSTRIAL TECHNOLOGY CENTER OF NAGASAKI   (Japan)

Author keywords

Diamond like carbon; Inner wall; Plasma source ion implantation; Tube

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; ION IMPLANTATION; MAGNETIC FIELDS; PLASMA SOURCES; RAMAN SCATTERING; STAINLESS STEEL; VACUUM;

INTEGRATED INTENSITY RATIO;

DIAMOND LIKE CARBON FILMS;

EID: 0038413562     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00838-3     Document Type: Conference Paper

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