Design and implementation of a vacuum-compatible laser-based subnanometer-resolution absolute distance measurement system

Optical Engineering

Volumn 44, Issue 1, 2005, Pages 1-5

  Naulleau, Patrick P ^a   Denham, Paul E ^a   Rekawa, Senajith ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Distance measuring; Focus sensing; Synchrotron radiation; Vacuum

Indexed keywords

DISTANCE MEASUREMENT; FIBER OPTIC SENSORS; FIBER OPTICS; FOCUSING; IMAGING SYSTEMS; INTERFEROMETRY; LIGHT REFLECTION; LITHOGRAPHY; PHOTODETECTORS; PHOTODIODES; SYNCHROTRON RADIATION; VACUUM;

DISTANCE MEASUREMENT SYSTEM; FOCUS SENSING; IMAGING OPTICS; SUBNANOMETER RESOLUTION;

OPTICAL DESIGN;

EID: 14544270974     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1830043     Document Type: Article

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