Simulated reaction dynamics of F atoms on partially fluorinated Si(100) surfaces

Surface Science

Volumn 360, Issue 1-3, 1996, Pages 200-212

  Carter, Lawrence E ^a   Carter, Emily A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Atom solid interactions; Fluorine; Low index single crystal surfaces; Models of surface chemical reactions; Molecular dynamics; Silicon; Single crystal surfaces; Solid gas interfaces; Surface chemical reactions

Indexed keywords

FLUORINE; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; PHASE INTERFACES; REACTION KINETICS; SINGLE CRYSTALS; SURFACE TREATMENT;

ATOM SOLID INTERACTIONS; ATOMISTIC DYNAMICS; FLUORINATION; INTERACTION POTENTIAL; LOW INDEX SINGLE CRYSTAL SURFACES; TRANSLATIONAL EXCITATION;

SEMICONDUCTING SILICON;

EID: 0030189683     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/0039-6028(96)00620-6     Document Type: Article

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