Thick-film PZT-metallic triple beam resonator

Electronics Letters

Volumn 39, Issue 13, 2003, Pages 982-983

  Yan, T ^a   Jones, B E ^a   Rakowski, R T ^a   Tudor, M J ^b   Beeby, S P ^b   White, N M ^b  

^a BRUNEL UNIVERSITY   (United Kingdom)

^b UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; PIEZOELECTRIC MATERIALS; STAINLESS STEEL; SUBSTRATES; THICK FILMS; VIBRATIONS (MECHANICAL); ZIRCONIUM COMPOUNDS;

METALLIC TRIPLE BEAM RESONATORS;

RESONATORS;

EID: 0038723107     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20030611     Document Type: Article

References (4)

1. BEEBY, S.P., and WHITE, N.M.: 'Thick-film PZT - silicon micro-machined resonator', Electron. Lett., 2000, 36. (19), pp. 1661-1662
2. JONES, B.E., and WHITE, N.M.: 'Metallic resonators'. Patent Application GB0302585.5, 2003
3. FABULA, T.H., WAGNER, H.-J., and SCHMIDT, B.: 'Triple-beam resonant force sensor based on piezoelectric thin films', Sens. Actuators A, 1994, 41-42, pp. 375-380
4. RANDALL, D.S., RUDKIN, M.J., CHESHMEHDOOST, A., and JONES, B.E.: 'A pressure transducer using a metallic triple-beam tuning fork', Sens. Actuators A, 1997, 60, pp. 160-162