Focused ion beam tuning of in-plane vibrating micromechanical resonators

Electronics Letters

Volumn 35, Issue 15, 1999, Pages 1277-1278

  Syms, R R A ^a   Moore, D F ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; NATURAL FREQUENCIES; REACTIVE ION ETCHING; TUNING;

ION BEAM ETCHING; VIBRATING MICROMECHANICAL RESONATORS;

MICROACTUATORS;

EID: 0032675334     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19990855     Document Type: Article

References (6)

1. TANAKA, K., MOCHIDA, Y., SUGIMOTO, M., MORIYA, K., HASEGAWA, T., ATSUCHI, K., and OHWADA, K.: 'A micromachined vibrating gyroscope', Sens. Actuators, 1995, A50, pp. 111-115
2. PREWETT, P.D.: 'Focused ion beams - microfabrication methods and applications', Vacuum, 1993, 44, pp. 345-351
3. CABUZ, C., FUKATSU, K., HASHIMOTO, H., SHOJI, S., KURABAYASHI, T., MINAMI, K., and ESAHI, M.: 'Fine frequency tuning in resonant sensors'. Proc. IEEE Workshop on Micro Electro Mechanical Systems, Oiso, Japan, 25-28 January 1994, pp. 245-250
4. ADAMS, S.G., BERTSCH, F., and MACDONALD, N.C.: 'Independent tuning of the linear and nonlinear stiffness coefficients of a micromechanical device'. Proc. 9th Int. Workshop, on Microelectromechanical systems, San Diego, CA, 11-15 February 1996, pp. 32-37
5. SYMS, R.R.A.: 'Electrothermal frequency tuning of folded and coupled vibrating micromechanical resonators', J. Microelectromech. Syst., 1998, 7, pp. 164-171
6. DANIEL, J.H., MOORE, D.F., WALKER, J.F., and WHITNEY, J.T.: 'Focused ion beams in microsystem fabrication', Microelectron. Eng., 1997, 35, pp. 431-434