Modeling of and experiments on dust particle levitation in the sheath of a radio frequency plasma reactor

Journal of Applied Physics

Volumn 97, Issue 4, 2005, Pages

  Setyawan, Heru ^a   Shimada, Manabu ^b   Hayashi, Yutaka ^b   Okuyama, Kikuo ^b   Winardi, Sugeng ^a  

^a DEPARTMENT OF ELECTRICAL ENGINEERING   (Indonesia)

^b HIROSHIMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE EXCHANGE; ELECTRON TEMPERATURE; MOMENTUM TRANSFER; RADIO FREQUENCY PLASMA REACTORS;

CARRIER CONCENTRATION; CHARGE TRANSFER; DUST; MATHEMATICAL MODELS; MAXWELL EQUATIONS; PARTICLE SIZE ANALYSIS; PARTICLES (PARTICULATE MATTER); PLASMA DEVICES; PLASMA ETCHING; POISSON EQUATION; RADIO WAVES;

PLASMA SHEATHS;

EID: 13744252952     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1852696     Document Type: Article

References (27)

1. G. S. Selwyn, J. E. Heidenreich, and K. L. Haller, J. Vac. Sci. Technol. A 9, 2817 (1991).
2. J. E. Daugherty and D. B. Graves, J. Appl. Phys. 78, 2279 (1995).
3. D. Samsonov and J. Goree, Phys. Rev. E 59, 1047 (1999).
4. R. P. Dahiya, G. V. Paeva, W. W. Stoffels, E. Stoffels, G. M. W. Kroesen, K. Avinash, and A. Bhattacharjee, Phys. Rev. Lett. 89, 125001 (2002).
5. H. Setyawan, M. Shimada, and K. Okuyama, J. Appl. Phys. 92, 5525 (2002).
6. H. Setyawan, M. Shimada, Y. Imajo, Y. Hayashi, and K. Okuyama, J. Aerosol Sci. 34, 923 (2003).
7. H. Setyawan, M. Shimada, Y. Hayashi, K. Okuyama, and S. Yokoyama, Aerosol Sci. Technol. 38, 120 (2004).
8. H. Kersten, H. Deutsch, E. Stoffels, W. W. Stoffels, G. M. W. Kroesen, and R. Hippler, Contrib. Plasma Phys. 41, 598 (2001).
9. A. Brattli and O. Havnes, J. Vac. Sci. Technol. A 14, 644 (1996).
10. J. X. Ma, J. Liu, and M. Y. Yu, Phys. Rev. E 55, 4627 (1997).
11. J. Liu, D. Wang, T. C. Ma, Y. Gong, Q. Sun, J. X. Ma, and C. X. Yu, Phys. Plasmas 6, 1405 (1999).
12. S. V. Vladimirov and N. F. Cramer, Phys. Rev. E 62, 2754 (2000).
13. D. J. Kim and K. S. Kim, Aerosol Sci. Technol. 32, 293 (2000).
14. D. Wang and X. Wang, J. Appl. Phys. 89, 3602 (2001).
15. S. Takagi, K. Iyanagi, S. Onoue, T. Shinmura, and M. Fujino, Jpn. J. Appl. Phys., Part 1 41, 3947 (2002).
16. W. G. J. H. M. van Sark, H. Meiling, E. A. G. Hamers, J. Bezemer, and W. F. van der Weg, J. Vac. Sci. Technol. A 15, 654 (1997).
17. H. Setyawan, M. Shimada, K. Ohtsuka, and K. Okuyama, Chem. Eng. Sci. 57, 497 (2002).
18. B. M. Penetrante, J. N. Bardsley, and M. C. Hsiao, Jpn. J. Appl. Phys., Part 1 36, 5007 (1997).
19. K. U. Riemann, Phys. Fluids B 4, 2693 (1992).
20. D. Bose, T. R. Govindan, and M. Meyyappan, J. Appl. Phys. 87, 7716 (2000).
21. M. A. Lieberman, IEEE Trans. Plasma Sci. 16, 638 (1988).
22. M. S. Barnes, J. H. Keller, J. C. Forster, J. A. O'Neill, and D. K. Coultas, Phys. Rev. Lett. 68, 313 (1992).
23. P. P. Vitruk, H. J. Baker, and D. R. Hall, J. Phys. D 25, 1767 (1992).
24. J. Park, I. Henins, H. W. Hermann, and G. S. Selwyn, J. Appl. Phys. 89, 20 (2001).
25. C. Lai, R. A. Breun, P. W. Sandstorm, A. E. Wendt, N. Hershkowitz, and R. C. Woods, J. Vac. Sci. Technol. A 11, 1199 (1993).
26. T. Moriya, N. Ito, F. Uesugi, Y. Hayashi, and K. Okamura, J. Vac. Sci. Technol. A 18, 1282 (2000).
27. M. Zeuner and J. Meichsner, Vacuum 46, 151 (1995).