Visualization and numerical simulation of fine particle transport in a low-pressure parallel plate chemical vapor deposition reactor

Chemical Engineering Science

Volumn 57, Issue 3, 2002, Pages 497-506

  Setyawan, Heru ^a   Shimada, Manabu ^a   Ohtsuka, Kenji ^a   Okuyama, Kikuo ^a  

^a HIROSHIMA UNIVERSITY   (Japan)

Author keywords

CVD reactor; Dynamic behavior; Light scattering; Numerical simulation; Particle contamination; Reduced pressure

Indexed keywords

AEROSOLS; CHEMICAL VAPOR DEPOSITION; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; LIGHT SCATTERING; PARTICLES (PARTICULATE MATTER); SILICA; SUBSTRATES; THERMOPHORESIS; TRANSPORT PROPERTIES;

PARTICLE MOTIONS;

CHEMICAL REACTORS;

VAPOR DEPOSITION;

EID: 0037169327     PISSN: 00092509     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0009-2509(01)00373-6     Document Type: Article

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