Characterization of particle contamination in process steps during plasma-enhanced chemical vapor deposition operation

Journal of Aerosol Science

Volumn 34, Issue 7, 2003, Pages 923-936

  Setyawan, Heru ^a   Shimada, Manabu ^a   Imajo, Yuji ^a   Hayashi, Yutaka ^a   Okuyama, Kikuo ^a  

^a HIROSHIMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTORS; LIGHT SCATTERING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; THERMOPHORESIS;

PARTICLE MOTION;

CONTAMINATION;

CHEMICAL VAPOR DEPOSITION;

ARTICLE; CHEMICAL REACTION; ELECTRODE; LIGHT SCATTERING; MOLECULAR DYNAMICS; PARTICLE SIZE; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; VAPOR;

EID: 0037824579     PISSN: 00218502     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0021-8502(03)00066-1     Document Type: Article

References (11)

1. Barnes M.S., Keller J.H., Forster J.C., O'Neill J.A., Coultas D.K. Transport of dust particles in glow-discharge plasmas. Physics Review Letters. 68:1992;313-316.
2. Childs M.A., Gallagher A. Plasma charge-density ratios in a dusty plasma. Journal of Applied Physics. 87:2000;1086-1090.
3. Choi S.J., Rader D.J., Geller A.S. Massively parallel simulations of Brownian dynamics particle transport in low pressure parallel-plate reactors. Journal of Vacuum Science and Technology A. 14:1996;660-665.
4. Collins S.M., Brown D.A., O'Hanlon J.F., Carlile R.N. Postplasma particle dynamics in a gaseous electronics conference reference cell. Journal of Vacuum Science and Technology A. 13:1995;2950-2953.
5. Collins S.M., Brown D.A., O'Hanlon J.F., Carlile R.N. Particle trapping, transport, and charge in capacitively and inductively coupled argon plasmas in a gaseous conference reference cell. Journal of Vacuum Science and Technology A. 14:1996;634-638.
6. Garrity M.P., Peterson T.W., Garrett L.M., O'Hanlon J.F. Fluid simulations of particle contamination in postplasma processes. Journal of Vacuum Science and Technology A. 13:1995;2939-2944.
7. Selwyn G.S., Singh J., Bennett R.S. In situ laser diagnostic studies of plasma-generated particulate contamination. Journal of Vacuum Science and Technology A. 77:1989;2758-2765.
8. Setyawan H., Shimada M., Ohtsuka K., Okuyama K. Visualization and numerical simulation of fine particle transport in a low-pressure parallel plate chemical vapor deposition reactor. Chemical Engineering Science. 57:2002;497-506.
9. Setyawan H., Shimada M., Okuyama K. Characterization of fine particle trapping in a plasma-enhanced chemical vapor deposition reactor. Journal of Applied Physics. 92:2002;5525-5531.
10. Talbot L., Cheng R.K., Schefer R.W., Willis D.R. Thermophoresis of particles in a heated boundary layer. Journal of Fluid Mechanics. 101:1980;737-758.
11. Yeon C.K., Kim J.H., Whang K.W. Dynamics of particulates in the afterglow of a radio frequency excited plasma. Journal of Vacuum Science and Technology A. 13:1995;927-930.