Measurement of thermal conductivity of thin films with a Si-N membrane-based microcalorimeter

Review of Scientific Instruments

Volumn 76, Issue 2, 2005, Pages

  Zink, B L ^a,b   Revaz, B ^a,c   Cherry, J J ^a   Hellman, F ^a,d  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c UNIVERSITY OF GENEVA   (Switzerland)

^d UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM THICKNESS; LOW-PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD); MICROCALORIMETERS; RADIATION LOSSES;

CALORIMETERS; CHEMICAL VAPOR DEPOSITION; FILM GROWTH; LEAD; LIGHT SCATTERING; MAGNETIC FIELDS; MAGNETORESISTANCE; PHONONS; SEMICONDUCTING SILICON; SILICON NITRIDE; THERMAL CONDUCTIVITY; THERMAL EFFECTS; THERMAL GRADIENTS; THERMOMETERS;

THIN FILMS;

EID: 13744250966     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1848658     Document Type: Article

References (22)

1. D. G. Cahill, H. E. Fischer, T. Klitsner, E. T. Swartz, and R. O. Pohl, J. Vac. Sci. Technol. A 7, 1259 (1989).
2. D. G. Cahill, Rev. Sci. Instram. 61, 802 (1990).
3. D. G. Cahill, W. K. Ford, K. E. Goodson, G. D. Mahan, A. Majumdar, H. J. Maris, R. Merlin, and S. R. Phillpot, J. Appl. Phys. 93, 793 (2003).
4. U. Bernini, S. Lettieri, P. Maddalena, R. Vitiello, and G. D. Francia, J. Phys.: Condens. Matter 13, 1141 (2001).
5. M. L. Grilli, D. Ristau, M. Dieckmann, and U. Willamowski, Appl. Phys. A: Mater. Sci. Process. 71, 71 (2000).
6. S. Moon, M. Hatano, M. Lee, and C. P. Grigoropoulos, Int. J. Heat Mass Transfer 45, 2439 (2002).
7. K. E. Goodson, M. I. Flik, L. T. Su, and D. A. Antoniadis, IEEE Electron Device Lett. 14, 490 (1993).
8. J. O. Willis and D. M. Ginsberg, Phys. Rev. B 14, 1916 (1976).
9. A. Irace and P. M. Sarro, Sens. Actuators, A 76, 323 (1999).
10. E. Jansen and E. Obermeier, J. Micromech. Microeng. 6, 118 (1996).
11. W. Holmes, J. M. Gildemeister, P. L. Richards, and V. Kotsubo, Appl. Phys. Lett. 72, 2250 (1998).
12. D. W. Denlinger, E. N. Abarra, K. Allen, P. W. Rooney, M. T. Messer, S. K. Watson, and F. Hellman, Rev. Sci. Instrum. 65, 946 (1994).
13. B. Revaz, B. L. Zink, D. O'Neil, L. Hull, and F. Hellman, Rev. Sci. Instrum. 74, 4389 (2003).
14. B. L. Zink and F. Hellman, Solid State Commun. 129, 199 (2004).
15. B. L. Zink, B. Revaz, R. Sappey, and F. Hellman, Rev. Sci. Instrum. 73, 1841 (2002).
16. T. Klitsner, J. E. VanCleve, H. E. Fischer, and R. O. Pohl, Phys. Rev. B 38, 7576 (1988).
17. effε, which is all that is required to subtract the radiation contribution from the measured thermal link.
18. B. L. Zink, Ph. D. thesis, University of California, San Diego (2002).
19. S. B. Amason, S. P. Herschfield, and A. F. Hebard, Phys. Rev. Lett. 81, 3936 (1998).
20. R. L. Powell and W. A. Blanpied, eds., Thermal Conductivity of Metals and Alloys at Low Temperatures, National Bureau of Standards Circular 556 (United States Department of Commerce, Washington, DC, 1954).
21. R. T. Syme, M. J. Kelly, and M. Pepper, J. Phys.: Condens. Matter 1, 3375 (1989).
22. T. Starz, U. Schmidt, and F. Volklein, Sens. Mater. 7, 395 (1995).