Nano-scale displacement measurement of MEMS devices using fiber optic interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5145, Issue , 2003, Pages 196-201

  Lee, C W ^a   Zhang, X M ^a   Tjin, S C ^a   Liu, A Q ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

MEMS; MEMS measurement; Optic interferometry

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; LASERS; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTICAL FILTERS; WAVEGUIDE COUPLERS;

FIBER OPTIC INTERFEROMETRY; MICROELECTROMECHANICAL SYSTEM FABRY-PEROT FILTER; MICROMIRROR; NANO-SCALE DISPLACEMENT MEASUREMENT;

INTERFEROMETRY;

EID: 1342309677     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.500435     Document Type: Conference Paper

References (14)

1. A. Q. Liu, X. M. Zhang, V. M. Murukeshan, Q. X. Zhang, Q. B. Zhou & S. Uppili. "An Optical Crossconnect (OXC) using Drawbridge Micromirrors". Sensors Actuators A (97-98), 227-238, 2002.
2. A. Q. Liu, X. M. Zhang, C. Lu, F. Wang, C. Lu & Z. S. Liu. "Optical and Mechanical Models for a Variable Optical Attenuator using a Micromirror Drawbridge". Journal of Micromechanics and Microengineering, 13, 400-411, 2003.
3. A. Q. Liu, X. M. Zhang, V. M. Murukeshan, C. Lu & T. H. Cheng. "Micromachined Wavelength Tunable Laser With an Extended Feedback Model". IEEE Journal on Selected Topics in Quantum Electronics, 8, 73-79, 2002.
4. A. Q. Liu, X. M. Zhang, V. M. Murukeshan & Y. L. Lam, "A Novel Integrated Micromachined Tunable Laser using Polysilicon 3D Mirror". IEEE Photon. Technol. Lett., 13, 427-429, May 2001.
5. R. A. Martínez-Celario, B. Barrientos, F. J. Sanchez-Marín, L. M. López & J. A. Rayas. "out-of-plane Displacement Measurement by Electronic Speckle Pattern Interferometry in Presence of Large In-plane Displacement." Optical Communication, 208, 17-24, 2002.
6. J. Wylde & T. J. Hubbard. "Measurement of MEMS Displacements and Frequencies using Laser Interferometry." Proceeding of the 1999 IEEE Canadian Conference on Electrical and Computing Engineering, 1680-1681, 1999.
7. C. J. Tay, C. Quan, S. H. Wang & H. M. Shang. "Determination of a Micromirror Angular Rotation Using Laser Interferometric Method". Optics Communications, 195, 71-77, 2001.
8. M. R. Hart, R. A. Conant, K. Y. Lau & R. S. Muller. "Stroboscopic Interferometer System for Dynamic MEMS Characterization". Journal of Microelectromechanical Systems, 9, 409-417, 2000.
9. Rembe, C., Muller, L., Muller, R. S., & Howe, R. T. "Full Three-Dimensional Motion Characterization of a Gimballed Electrostatic Actuator". Proc. of IEEE International Reliability Symposium, Orlando, Florida, April 30-May 3, 2001.
10. V. Métivier, E. Morteau, E. Ouisse & H. C. Seat. "Dual-cavity Extrinsic Fiber Fabry-Perot Interferometer for Vibration-displacement Measurements". The 16th European Conference on Solid-State Transducers, 383-386, 2002.
11. J. Hecht. Understanding Fiber Optics. 4th Edition. Prentice Hall, 2002.
12. E. Hecht. Optics. 4th Edition. Addison-Wesley, 2002.
13. LabVIEW User Manual for Windows. National Instruments, 1993.
14. J. Y. Lee, S. H. Kim, H. T. Lim, C. H. Kim, C. W. Baek & Y. K. Kim. "Electric Spring Modeling for a Comb Actuator Deformed by the Footing Effect in Deep Reactive Ion Etching". Journal of Micromechanics and Microengineering, 13, 72-79, 2003.