Measurement of MEMS displacements and frequencies using laser interferometry

Canadian Conference on Electrical and Computer Engineering

Volumn 3, Issue , 1999, Pages 1680-1685

  Wylde, J ^a   Hubbard, T J ^a  

^a DALHOUSIE UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELD EFFECTS; INTERFEROMETERS; INTERFEROMETRY; LASER APPLICATIONS; LASER BEAMS; NATURAL FREQUENCIES; NUMERICAL METHODS; VIBRATION MEASUREMENT;

DISPLACEMENTS; LASER INTERFEROMETRY; MICHAELSON-MORLEY INTERFEROMETERS; MICRODEVICES; MICROMACHINED BEAMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033326151     PISSN: 08407789     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)