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Optics Communications

Volumn 195, Issue 1-4, 2001, Pages 71-77

Determination of a micromirror angular rotation using laser interferometric method

(4) Tay, C J a Quan, C a Wang, S H a Shang, H M a

a NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

Author keywords

Angular rotation; Laser interferometry; Micromirror; Optical MEMS

Indexed keywords

ELECTROSTATICS; HELIUM NEON LASERS; INTERFEROMETRY; LASER BEAM EFFECTS; LIGHT INTERFERENCE; LIGHT REFLECTION; MICROELECTROMECHANICAL DEVICES; OPTICAL INSTRUMENT LENSES;

LASER INTERFEROMETRY; MICROMIRRORS;

MIRRORS;

EID: 0035426255 PISSN: 00304018 EISSN: None Source Type: Journal
DOI: 10.1016/S0030-4018(01)01199-3 Document Type: Article

Times cited : (10)

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