Nitrogen-rich silicon nitride thin films for deep-ultraviolet Mirau interferometry

Optics Letters

Volumn 22, Issue 8, 1997, Pages 492-494

  Chang, F C ^a   Kino, G S ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037531275     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.22.000492     Document Type: Article

References (6)

1. G. S. Kino and S. S. C. Chim, Appl. Opt. 29, 3775 (1990).
2. S. S. C. Chim, P. A. Beck, and G. S. Kino, Rev. Sci. Instrum. 61, 980 (1990).
3. A. Kiermasz and K. Beekman, Semicond. Int. 13(6), 108 (1990).
4. P. A. Beck, Ph.D. dissertation (Stanford University, Stanford, California, 1990).
5. K. E. Petersen, Proc. IEEE 70, 420 (1982).
6. F. C. Chang, G. S. Kino, and W. R. Studenmund, Proc. SPIE 2196, 35 (1994).