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Volumn 8, Issue 1, 2002, Pages 80-87
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Optomechanical model of surface micromachined tunable optoelectronic devices
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Author keywords
Cavity resonators; Integrated optoelectronics; Micromachining; Modeling; Optical diffraction; Optical losses; Perturbation methods
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Indexed keywords
COMPUTER SIMULATION;
DEFORMATION;
DIFFRACTIVE OPTICS;
MICROMACHINING;
MIRRORS;
PERTURBATION TECHNIQUES;
TUNABLE OPTOELECTRONIC DEVICES;
OPTOELECTRONIC DEVICES;
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EID: 0036244161
PISSN: 1077260X
EISSN: None
Source Type: Journal
DOI: 10.1109/2944.991402 Document Type: Article |
Times cited : (10)
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References (23)
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