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Journal of the Korean Physical Society

Volumn 46, Issue 1, 2005, Pages 254-257

Interface control of Y 2O 3 thin film with Si(100) in a metal-(ferroelectric)-insulator-semiconductor structure

(2) Lee, Chang Ki a Park, Hyung Ho a

a Yonsei University (South Korea)

Author keywords

Chemical oxide; Interface control; Y 2O 3; Yttrium silicate

Indexed keywords

EID: 12944327763 PISSN: 03744884 EISSN: None Source Type: Journal
DOI: None Document Type: Conference Paper

Times cited : (4)

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