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Volumn 85, Issue 23, 2004, Pages 5580-5582

Density profiles and electrical properties of thermally grown oxide nanofilms on p-type 6H-SiC(0001)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; DENSITY (SPECIFIC GRAVITY); FILM GROWTH; INTERFACES (MATERIALS); NANOSTRUCTURED MATERIALS; NITRIDING; OXIDATION; SUBSTRATES;

DENSITY PROFILES; HIGH-FIELD STRESS; NANOFILMS; PREOXIDATION CLEANING;

THIN FILMS;

EID: 12844264227 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1829385 Document Type: Article

Times cited : (10)

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