Nano pore structure of low-k SiOC(-H) films measured by small angle neutron scattering

Journal of the Korean Physical Society

Volumn 45, Issue SUPPL., 2004, Pages

  Oh, Kyoung Suk ^a   Choi, Chi Kyu ^a   Lee, Heon Ju ^a  

^a Jeju National University   (South Korea)

Author keywords

Hybrid type SiOC( H) film; Low dielectric constant; Low k material; Nano pore structure; Porosity

Indexed keywords

EID: 12744277355     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (18)

1. M. Morgen, E. Todd, J. H. J. H. Zhao, C. Hu, T. Cho and P. S. Ho, Annu. Rev. Mater. Sci. 30, 651 (2000).
2. J. Y. Kim, M. S. Hwang, Y. H. Kim, H. J. Kim and Y. Lee, J. Appl. Phys. 90, 2469 (2001).
3. S. Y. Jing, H. J. Lee and C. K. Choi, J. Korean Phys. Soc. 41, 769 (2002).
4. C. S. Yang, K. S. Oh, J. Y. Ryu, D. C. Kim, S. Y. Jing and C. K. Choi, Thin Solid Films 390, 113 (2001).
5. Y. H. Kim, K. Lee and H. J. Kim, J. Vac. Sci. Technol. A 18, 1216 (2000).
6. Y. H. Kim, H. J. Kim, J. Y. Kim, and Y. Lee, J. Korean Phys. Soc. 40, 94 (2002).
7. S. Y. Jing, C. K. Choi and H. J. Lee, J. Korean Phys. Soc. 39, S302 (2001).
8. K. S. Oh, S. Y. Jing, C. K. Choi, K. M. Lee and H. J. Lee, J. Korean Phys. Soc. 39, 291 (2001).
9. H. J. Lee, K. S. Oh and C. K. Choi, Surface Coatings Tech. 171, 296 (2003).
10. H. J. Lee and C. K. Choi, J. Korean Phys. Soc. 43, 787 (2003).
11. A. Grill and D.A. Neumayer, J. Appl. Phys. 94, 6697 (2003).
12. G. Maier, Prog. Polym. Sci. 26, 3 (2001).
13. A. Grill and V. Patel, J. Appl. Phys. 85, 3314 (1999).
14. P. N. Sen and M. F. Thrope, Phys. Rev. B15, 4030 (1997).
15. G. Lucovsky, Philos. Mag. B39, 513 (1979).
16. E. J. Shin, B. S. Seong, Y. S. Han, K. P, Hong, C. H. Lee and H. J. Kang, J. Appl. Cryst. 36, 624 (2003).
17. U. Keiderling, A. Wiedenmenn, V. Srdic, M. Winterer and H. Hahn, J. Appl. Cryst. 33, 483 (2000).
18. P. Lindner and Th. Zemb, Neutrons, X-rays and Light : Scattering methods applied to soft condensed matter (North-Holland, Amsterdam, 2002).