Measuring the Properties of Pores in Si-O-C(-H) Composite Films by Small-Angle Neutron Scattering

Journal of the Korean Physical Society

Volumn 43, Issue 5 I, 2003, Pages 787-791

  Lee, Heon Ju ^a   Choi, Chi Kyu ^a  

^a Jeju National University   (South Korea)

Author keywords

Dielectric constant; ICPCVD; Nano size pores

Indexed keywords

EID: 0344551214     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.43.787     Document Type: Article

References (18)

1. M. Morgen, E. Todd, J. H. J. H. Zhao, C. Hu, T. Cho and P. S. Ho, Ann. Rev. Mater, Sci. 30, 651 (2000).
2. J. Y. Kim, M. S. Hwang, Y. H. Kim, H. J. Kim and Y. Lee, J. Appl. Phys. 90, 2469 (2001).
3. S. Y. Jing, H. J. Lee and C. K. Choi, J. Korean Phys. Soc. 41, 769 (2001).
4. C. S. Yang, K. S. Oh, J. Y. Ryu, D. C. Kim, S. Y. Jing and C. K. Choi, Thin Solid Films 390, 113 (2001).
5. K. Endo, K. Shinoda and T. Tatsumi, J. Appl. Phys. 86, 2739 (1999).
6. Nigel P. Hacker, MRS. Bulletin 22, 33 (1997).
7. K. Aumaille, C. Vallee, A. Granier, A. Goullet, F. Gaboriau and G. Turban, Thin Solid Films 359, 188 (2000).
8. H. J. Lee, K. S. Oh and C. K. Choi, Surface and Coatings Tech. 171/1-3, 296 (2003).
9. A. Gill and V. Patel, J. Appl. Phys. 85, 3314 (1999).
10. Y. H. Kim, K. Lee and H. J. Kim, J. Vac. Sci. Technol. A 18, 1216 (2000).
11. L. J. Bellamy, The Infra-red Spectra of Complex Molecules (Chapman and Hall, London, 1975), p. 9 and p. 372.
12. P. N. Sen and M. F. Thrope, Phys. Rev. B 15, 4030 (1997).
13. S. Y. Jing, C. K. Choi and H. J. Lee, J. Korean Phys. Soc. 39, S302 (2001).
14. S. Y. Jing, H. J. Lee and C. K. Choi, J. Korean Phys. Soc. 42, 769 (2002).
15. E. J. Shin, B. S. Seong, Y. S. Han, K. P. Hong, C. H. Lee and H. J. Kang, J. Appl. Cryst. 36, 624 (2003).
16. U. Keiderling, A. Wiedenmenn, V. Srdic, M. Winterer and H. Hahn, J. Appl. Cryst. 33, 483 (2000).
17. P. Lindner and Th. Zemb, Neutrons, X-rays and Light: Scattering Methods Applied to Soft Condensed Matter (North-Holland, Amsterdam, 2002).
18. J. Kohbrecher, SANSFITTCL (c), version 0.2 alpha. PSI, Germany (1999).