Microlens array fabricated by excimer laser micromachining with gray-tone photolithography

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 3, 2003, Pages 1280-1283

  Tien, Chung Hao ^a   Chien, Yeh En ^a   Chiu, Yi ^a   Shieh, Han Ping D ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Excimer laser; Gray tone photolithography; SIL

Indexed keywords

DATA PROCESSING; EXCIMER LASERS; MELTING; MICROMACHINING; OPTICAL INTERCONNECTS; PHOTOLITHOGRAPHY; SCANNING;

MICROLENS ARRAYS;

MICROLENSES;

EID: 0037504236     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.1280     Document Type: Article

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