Ultracompliant, passively decoupled thermal probe arrays: Large area mapping of non-planar surfaces without force feedback

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 825-828

  McNamara, Shamus ^a   Basu, Amar ^a   Lee, Joohyung ^a   Gianchandani, Yogesh B ^a,b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BOLOMETERS; ELECTRIC RESISTANCE; ETCHING; FEEDBACK; INTEGRATED CIRCUITS; PIEZOELECTRIC MATERIALS; POLYIMIDES; RESONANCE; SCANNING ELECTRON MICROSCOPY; THERMAL CONDUCTIVITY;

MECHANICAL RESONANCE; MINIMUM DETECTABLE SIGNALS (MDS); SCANNING THERMAL MICROSCOPY (STHM);

THERMOANALYSIS;

EID: 3042786047     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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