Scaling torsional cantilevers for scanning probe microscope arrays: Theory and experiment

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 455-458

  Miller, Scott A ^a   Turner, Kimberly L ^a   MacDonald, Noel C ^a  

^a Cornell Univ ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CAPACITORS; MICROMACHINING; MICROSCOPES; SEMICONDUCTING SILICON; SENSORS; SINGLE CRYSTALS;

INTERDIGITATED ELECTRODE CAPACITORS; SCALING TORSIONAL CANTILEVERS; SCANNING PROBE MICROSCOPY;

MICROELECTROMECHANICAL DEVICES;

EID: 0030702424     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)