Effect of geometry and materials on residual stress measurement in thin films by using the focused ion beam

Journal of Engineering Materials and Technology

Volumn 126, Issue 4, 2004, Pages 457-464

  Kang, Ki Ju ^a   Darzens, Severine ^b   Choi, Gee Seob ^a  

^a Chonnam National University   (South Korea)

^b Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; COMPUTER SOFTWARE; CRACKS; DIAMOND LIKE CARBON FILMS; ELASTICITY; FILM GROWTH; FINITE ELEMENT METHOD; GLASS; IMAGING SYSTEMS; ION BEAMS; RESIDUAL STRESSES; STRAIN; TWO DIMENSIONAL;

FOCUSED ION BEAMS (FIB); SLOT LENGTH; SLOT WIDTH; TWO-DIMENSIONAL ELASTICITY;

THIN FILMS;

EID: 12344252917     PISSN: 00944289     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1789965     Document Type: Article

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