Electron energy loss spectroscopy study of the formation process of Si nanocrystals in SiO2 due to electron stimulated desorption-decomposition

Micron

Volumn 30, Issue 2, 1999, Pages 147-150

  Takeguchi, M ^a   Furuya, K ^a   Yoshihara, K ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Electron energy loss spectroscopy; Electron stimulated desorption; Nanocrystals; Si; SiO2; Ultrahigh vacuum field emission transmission electron microscope

Indexed keywords

EID: 0032996204     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0968-4328(99)00018-9     Document Type: Conference Paper

References (13)

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